Micropatterning of nanoparticle films by bilayer lift-off

Nanostructured films are deposited by a new technique that matches supersonic cluster beam deposition with flame spray pyrolysis production of nanoparticles (FlameBeam). These films are structured with micrometric lateral resolution, applying a lift-off method by pre-structuring a photoresist-PMMA bilayer with a suitable 'mushroom-like' cross-section, depositing a nanostructured silver film on top and lifting off the bilayer in an aqueous solution. Optical inspection revealed that line-shaped microstructures, having a minimal width of up to 3 µm, can be successfully obtained. The nanostructured films have survived the aqueous treatment, as demonstrated by electron microscopy imaging and electrical characterization through 4-point measurement method (Van-der-Pauw). The latter has been possible through sputtered gold pads that were realized on the substrate prior to the deposition of the photoresist and of the nanostructured film. These results disclose novel possibilities in the fine patterning of FlameBeam-deposited films and their integration into microelectromechanical systems devices in general.